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Automated Nanomanufacturing System to Assemble Carbon Nanotube Based Devices

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, USA, kinglai{at}egr.msu.edu

Ning Xi

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, USA

Carmen Kar Man Fung

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, USA

Jiangbo Zhang

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, USA

Hongzhi Chen

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, USA

Yilun Luo

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, USA

Uchechukwu C. Wejinya

Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, USA

In this paper we report the design and implementation of a novel automated manufacturing system for carbon nanotube (CNT)-based nanodevices, which integrates a new dielectrophoretic (DEP) microchamber into a robotic-based deposition workstation. The microchamber has been fabricated to separate and select CNTs with the desired electronic property by using DEP force. Moreover, a series of tools for mass-producing consistent nanodevices has been developed with the CNT deposition workstation, such as computer-controllable micromanipulators and a micro-active nozzle. Detailed experimental studies of the CNT separation and deposition processes have been performed on both single-walled carbon nanotubes (SWCNTs) and multi-walled carbon nanotubes (MWCNTs). Preliminary results show that CNTs could be manipulated to multiple pairs of microelectrodes repeatedly. Consistent I—V characteristics and CNT formations of the fabricated devices were obtained. The yield of semi-conducting CNTs was also increased by using our system. Therefore, by using the proposed CNT separation and deposition system, CNT-based nanodevices with specific and consistent electronic properties can be manufactured automatically and effectively.

Key Words: carbon nanotube • deposition • dielectrophoretic manipulation

The International Journal of Robotics Research, Vol. 28, No. 4, 523-536 (2009)
DOI: 10.1177/0278364908097585


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